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Installation
4. Calibration method
1. Connect a Pirani vacuum gauge and the gauge manifold vacuum gauge (0 - 760 mmHg) to
2. Make sure the reading of the Pirani vacuum gauge is 5 Torr (667 Pa) or less. The reading of
3. Check the attached gauge on the gauge manifold. Adjust the gauge if the reading is not
4. Adjust the gauge manifold valve so that the Pirani vacuum gauge reads 5 Torr.
5. Mark the position indicated by the gauge manifold gauge with an oil based ink pen.
6. Use the mark of the gauge manifold as a target when vacuuming in the field.
(Reference) Types of vacuum pump with respective maximum degree of vacuum
Oil Rotary
(Oil Using)
Oilless Rotary
(No Need of Oil)
42
the vacuum pump at the same time, and run the pump for about 3 minutes.
conventional vacuum pumps lowers to about 0.2 Torr.
If the reading is not 5 Torr or less, check the vacuum pump oil. (Oil is low in many cases.)
exactly correct.
Fig. 1
Pirani vacuum gauge
Pressure detection section
Maximum Degree of Vacuum
Type
0.02 mmHg
10 mmHg
0.02 mmHg
Gauge manifold
Indicator
Expulsion Capacity Vacuum Drying
Suitable
100 l/min
Unsuitable
50 l/min
Suitable
40 l/min
Vacuum pump
Use
Air Expulsion
Suitable
Suitable
Suitable
←
Many handy
pumps fall into this
category
General Information
SiEN34-705
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