Observation; Take Out The Sample - Hitachi SEM S-4700 User Manual

Field emission scanning electron microscope
7.3.2. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to make the displacement as
small as possible.
7.3.3. Click "Stigma Alignment Y" and repeat the same operation.
7.3.4. Click "OFF"
7.4. Low Mag Position
7.4.1. In the mode "High Mag", set the lower magnification, and set a landmark on the sample in the center of
the screen.
7.4.2. Change to "Low Mag" mode. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to
set again the landmark in the center of the screen.
7.4.3. Click "OFF" in the "Alignment" window.
7.4.4. Close the "Alignment" window.

8. Observation

Only the basic operations are mentioned. For other useful functions such as recording stage coordinates or rotating
the image, refer to the manual.
8.1. Select a suitable scan speed. The "Fast" mode is suitable to look for a specific location on the sample, the
"Slow" mode is used to observe or take pictures of the sample with a better image quality. It is advantageous to
refine the focus or stigmatism in the "Reduced Area" mode. Change the mode according to your needs, with the
icons located at the top left of the "Scanning Image" window.
8.2. Look for the place you want to observe by moving the stage with the track ball.
8.3. Rotate the "Tilt" knob to incline the sample. The range is from -5˚ to 45˚.
8.4. Rotate the "θ" knob to rotate the sample. It can rotate by 360˚.
8.5. The magnification can be adjusted with the knob on the operation panel. The switching between "High Mag"
and "Low Mag" is done on the magnification window on the screen.
8.6. The Focus is adjusted with the knob on the operation panel. "Coarse" is for coarse adjustment and "Fine" is
for fine adjustment.
8.7. The Stigmatism is adjusted with the knob on the operation panel. Rotate the knob to have the sharpest
image. Adjust X first, then Y and repeat to get the sharpest image.
8.8. Repeat alternatively Focus and Stigmatism adjustment to get the sharpest image.
8.9. Always set the "Beam Monitor" in the center of the screen to ON. When it turns red, click "Adjust".
8.10. Before taking a picture (digital, not Polaroid), set the picture parameters:
8.10.1. Menu bar > Setup > Image
8.10.2. The parameters to set are for example the number of superposition in case of Fast Mode picture or the
resolution in case of Slow Mode picture.
8.11. The picture brightness is different in Fast and Slow modes. Try to see. After changing mode, adjust the
brightness and contrast with the knob on the operation panel.
8.12. Click on the camera icon at the lower right of the screen to take the picture.
8.13. Click on the floppy disk icon to save the picture. The pictures can be managed with the Image Manager.
8.14. The data can be copied using the secured USB memory card.

9. Take out the sample

9.1. High voltage OFF: click OFF button at the top right side of the "HV Control" window.
9.2. Set the stage to the initial position
Move back the stage to its initial position: X=Y=12.5mm, Z=12mm, Tilt=0˚, θ=0˚. For X and Y, click "Go To Home"
in the "Stage Control" window. For the rest, use the knob.
9.3. Take out the sample
9.3.1. Open MV-1
9.3.2. While observing inside the S.C., insert the rod and screw it into the sample holder. Rotate clockwise.
After screwing the rod, the gap between the rod ant the S.E.C should be about one finger width.
9.3.3. Take out the rod slowly to the locked position.
9.3.4. Close MV-1.
9.3.5. Check that the gas exhaust switch is set to S.E.C.
9.3.6. Check once again that MV-1 is closed (C side) and then press AIR button.
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