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Versum Materials 161135 Manuals
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Versum Materials 161135 manual available for free PDF download: Installation, Operation & Maintenance Manual
Versum Materials 161135 Installation, Operation & Maintenance Manual (191 pages)
Absolute Control System
Brand:
Versum Materials
| Category:
Control Systems
| Size: 3.1 MB
Table of Contents
Table of Contents
5
Introduction to the Manual
10
Chapter 1 Delivery, Unpacking, and Inspection
10
Emergency Response - 24 Hour Service
11
Definition of Terms
11
Definitions
11
I.3.1 Definitions
11
Abbreviations
13
I.3.2 Abbreviations
13
Approved Chemicals
15
Delivery, Unpacking, and Inspection
16
Delivery
16
Unpacking
16
Inspection
17
Chapter 2 System Components and Specifications
18
Equipment and Features
19
Physical Description
19
Features
21
Physical Description
24
Vaporguard® Physical Specifications
24
Source Cup Assembly
26
Power Supply Module
27
Chapter 3 Vaporguard® Absolute Control System for Use with Trans-LC
29
Vaporguard® Manufactured for Use of Trans-LC
29
Trans-LC
29
Chapter 4 System Safety
33
Hazardous Location Safe Operation Requirements
33
Safety Labels
35
Alarm Interlocks
44
Hazardous Location Installation Requirements
47
Chemical Spill Cleanup
49
Decontamination Procedure
50
Chapter 5 System Operation
51
System Overview
51
Power Supply Module Overview
53
Source Cup Assembly Overview
55
Source Cup Assembly, Detailed Description
56
User Interface
56
Backlight for Sight Glass
57
Heater/Cooler START/STOP Power Switch
57
Liquid Level Alarm - Quartz Bubbler
59
Liquid Level Alarm - Stainless Steel Source Container
64
No Liquid Level
65
Temperature Probe
66
Sidewall Heater
68
Thermal Electric Cooler
68
Fan Failure Detection
68
Power Supply Module, Detailed Description
68
DDC Inputs/Outputs - Temperature/Level and any Alarm
71
Remote Temperature Set Point
71
Remote Temperature Output
72
Remote Display Module
72
Alarms
73
Alarm Interlocks
73
Alarm Enable
74
Temperature Alarm
74
Operating Instructions
76
Power up
76
Calibration Check
78
Temperature Set Point Adjustment
78
Level Check - Quartz Bubbler
79
Basic Keypad Features
81
Boot Screens
81
Main Screen
82
Alarm Screen
83
Password Screen
84
History Alarm
86
Display Screens
86
Software Version Screen
87
Date and Time
88
Raw Analog Input
88
Digital Inputs
89
Fan and Ambient Temperature
90
Bar Light
90
Save Change
91
System Config
91
Lid Heater (Not Available)
94
Main Screen Second Line Selection
94
Level Mode Select
94
Product Selection
95
Alarm Interlock
96
Alarm Enabled
96
Parameters and Limits
97
Alarm Mute/Light Bar Time
98
Temp Limit Alarms
98
Level Limit Alarms
99
LCD Display Controls
100
Buzzer
100
Change Clock
101
Default Setups
101
Set up Screens
103
PID Settings
103
Relay Manual Control
105
Alarm Definitions
106
Thermal Cutout Configuration
107
Chapter 6 System Installation
111
Introduction
111
Placement of the System
111
Installation
125
Electrical Requirements
125
Grounding Requirements
126
Environmental Requirements
126
Lighting Requirements
126
EMI/RFI Protection
126
Thermowell Oil
126
Vaporguard® Fan Clearance
127
Cables
127
Cable Installation Procedure
128
Tool Interface Connection
129
Description of Vaporguard® Alarms
136
Digital Inputs
140
Relay Manual Control
140
AC Power Connections
148
De-Energizing Procedure
149
6.6 Bubbler Installation
151
Installing Bubbler into Source Cup Assembly
155
Removing Bubbler from Source Cup Assembly
159
Decommissioning Procedure
160
Vaporguard® Programming
161
Chapter 7 Calibration
168
Introduction
168
Equipment Required for Calibration of Vaporguard® Circuit
168
Temperature Calibration of RTD Circuit
168
Temperature Calibration Procedure
169
Analog Output Calibration Procedure
172
Voltage Output Calibration
172
Verification Without Calibration
174
Safety Test
175
Maintenance Schedule
176
Spare Parts List
177
Chapter 8 Vaporguard® Stainless Steel Source Configuration
179
Introduction
179
Description
179
Stainless Steel Source Container Installation
185
Chapter 9 Pocl 3 Safe Handling and PPE Matrix
189
Chemical Handling
189
Matrix Definitions
190
Secondary Containment
190
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