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Dear users,
To help you have a smooth and successful TEM observation, I wrote up this basic operation manual.
Systematic theoretical training plus hands-on practical training may be the best way to understand the
details of this operation instruction for HF2000 TEM.
There are some notes in this instruction. Please read and follow them carefully, and please make sure you
follow what I told you ask before you touch the TEM if you do not know the consequence of your action.
HITACHI
Operation Manual
- Alignment and Operation -
Contents
3. Applying High Voltage
9. Selected area electron diffraction
10. Bright field imaging
17. Sample exchange (unloading)
18. Shutdown
HF2000 TEM
Takamichi MIYAZAKI / June 2009
1
Table of Contents
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Summary of Contents for Hitachi HF2000 TEM

  • Page 1: Table Of Contents

    Systematic theoretical training plus hands-on practical training may be the best way to understand the details of this operation instruction for HF2000 TEM. There are some notes in this instruction. Please read and follow them carefully, and please make sure you follow what I told you ask before you touch the TEM if you do not know the consequence of your action.
  • Page 2: Startup

    1. TEM startup • Right main panel Check the comments in the TEM log book. Enter your name, laboratory and contact information on the log book before any action on the TEM. • Make sure that TEM vacuum is good. At the vacuum state (right panel), SPEC, COL, and CAM indicators should be Vacuum state VAC position (all green), and GUN indicator is at EVAC...
  • Page 3: Set The Sample (Loading)

    2. Set the sample (loading) Normally, the sample holder stays in TEM. It is situated at position A (see in the following diagram). Note: Objective aperture must be out during sample holder loading / unloading. • Turn the switch on goniometer to Air. Wait till SPEC is at Air position (red light on vacuum state) and pull the holder out.
  • Page 4: Prepare For Beam Alignment

    3. Applying HV • Apply HV when vacuum is good • Make sure that the applying HV conditions are set at following state: V0 VOLTAGE 200kV R RATIO I1 CURRENT 30µA • Press the [FE] bottom once (left panel) and press [FLASH] when it’s flashing. IF current rise up, if the IF current is lower than 0.30 mA, repeatedly press [FLASH] bottom till IF current is >...
  • Page 5: Correct Condenser Astigmatism

    5. Correct condenser astigmatism(Magnification : 100K ~ 200K) Be sure to use the correct condenser astigmatism for TEM mode: • Open the GV and make sure you hear it click open. • Turn the Brightness control (left panel) to crossover, and center the beam with the Brightness Centering knobs (right panel).
  • Page 6: Z-Height Adjustment

    6. Z-height adjustment • Move edge of sample and set the objective lens current to 5.72 using focus control. Focus the sample using the Z-height adjustment screw on the specimen holder entry port. Note: An objective lens current of 5.72 is the optimal setting for minimum spherical aberration. You may also focus sample using wobblers method or minimum contrast method for the image focus.
  • Page 7: Image Focus And Objective Lens Astigmatism Correction

    左サブパネル 左サブパネル Left sub panel 8. Astigmatism correction of objective lens • Reset the OBJ STIGM-X and Y control knobs (stigmator) on the left sub panel. * This returns setting to the stigmator to preset level. • Set a magnification 2 or 3 times higher than used for photographing.
  • Page 8 • Insert objective aperture into the central spot that should be centered by using the objective X/Y adjustment screws. • Press [ZOOM] to seen a bright field image. • Pull out SA aperture • Correct the astigmatism by adjusting fine focus and OBJ STIG X and Y controls if necessary. (Using minimum contrast method and amorphous contrast) 10.
  • Page 9: Ccd Camera

    11. Photographing for film Usage of auto exposure time set mode Time mode provides a function for automatically setting the exposure time so as to obtain optimum photographic density on a film in response to a determined brightness. • Set the exposure time setting knob at AUTO. •...
  • Page 10: Sample Tilt

    13. Sample tilt • Press [DIFF]. (see Sec.9, SAED) • Adjust the sample tilt with electron beam direction along the zone axis. HAND HAND FOOT IGHT FOOT FOOT IGHT HAND IGHT 14. Astigmatism correction of beam tilt • Turn the WOBBLER ANGELE control on the right main panel fully clockwise. •...
  • Page 11: High Resolution Imaging

    15. High resolution imaging • Find an interesting sample area. • Focus the beam and sample to the crossover. • Press [DIFF] (see Sec.9, SAED) • Set the sample tilt along zone-axis by seeing SAED. • Insert the largest objective aperture into the beam by turning the aperture handle clockwise. •...
  • Page 12: Film Exchange

    Turn the sample holder counterclockwise till it stops. Turn the switch on goniometer on Air. Wait till SPEC is at Air position (red light on vacuum state) and pull the sample holder out. Position A (EVAC → AIR) 18. TEM shutdown and film exchange (Shutdown procedure) •...
  • Page 13 while raising the stopper, and the film magazine will come out. • Load a new full film magazine into the camera chamber. • Load an empty receiver. • Close the front door of the camera chamber. • Turn the CAMERA EVAC switch to EVAC. Usually after about 10 minutes. EVAC (green) lamp of VACCUM STATE lights up.
  • Page 14 HITACHI HF2000 TEM Operation Manual - EDX analysis in zoom mode - 1. Start up • Adjust the beam alignment in [ZOOM] mode. • Insert the X-ray detector. • Insert condenser aperture (2nd aperture) and minimize the swinging beam using the condenser X/Y adjustment screws when passing through crossover.
  • Page 15 3. Peak identification (Label peak) • Open the “Analyze” menu and select “Manual Peak identification“ • Click the expand button (+) to display the set of markers for the selected element. Clicking right lets you view a list periodic table element line.
  • Page 16 Choose the elements and 定量分析に適切な ラインを選択 lines for quantification MBTSを選択 Select “MBTS” 5. Shut down • Depress the “Retract” button to retract the X-ray detectors. • Close the spectra display window. • Shutdown the Windows software.
  • Page 17 HITACHI HF2000 TEM Operation Manual - Alignment in Analysis mode 1. Start up • Execute the beam alignments in zoom mode. (See the manual above) • Place the beam through the hole in the sample and increase magnification to 150kX. Remove all apertures, center the beam, and go to crossover.
  • Page 18 3. Voltage center of condenser lens Note the direction of the caustic movement when going to crossover. • Use the beam tilt controls (right sub panel) to shift the caustic in the same direction of the movement and brightness centering controls (right panel) to return the caustic to the center of the phosphor screen.
  • Page 19 HITACHI HF2000 TEM Operation Manual - STEM imaging and element mapping - 1. Start up • Move area of interest to the crosshairs on the phosphor screen and focus. • Adjust the z-height until the sample and correct objective astigmatism using the stigmators on the left sub panel.
  • Page 20 • Select “Acquire” → “Parameter” → “Set up”. Set the max. energy to 20.48 keV. • Find region of interest. Notice: When the dead time is too high (over 30%), select smaller condenser aperture, or acquire spectrum from thinner region. •...
  • Page 21 • Select “Acquire” → ““Point Dwell Acquire” and then set parameter up below. • Set [Scanning Speed] to 1. Depress • Save image as tiff-format with respect to each element.

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