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Using the Hitachi 3400-N VP-SEM
Before You Begin:
Sign in on the Calendar
Wear gloves
when handling anything that goes in the chamber such as stubs,
specimens, sample holders. Finger oils contaminate the machine and destroy image
quality.
Measure your sample's diameter and height accurately:
Improper sample measurements will cause the sample to hit
the detectors and create thousands of dollars of damage!
Opening the Chamber to Load Specimens
(This may also be done later using the software)
1. Click the "AIR" button on the front of the machine
(push hard enough to hear vacuum change)
2. Wait a few minutes until you hear the machine beep
3. Insert sample holder. **For multi-holder, insert with
sample #1 facing blue pen mark in chamber**
4. Close the chamber and hold it shut with your hand.
Press "EVAC" button on front of machine
of chamber door when vacuum engages it.
Starting PC-SEM:
5. Click the "PC-SEM" icon on the desktop. There is no
password.
6. When the PC-SEM finishes booting, you will see the
Specimen Dimensions window above
correct Diameter/Size and Height
sample. Click OK.
7. On the right side of the screen are 4 overlapping control
panels -Condition, Image, Utility and Stage
software will launch on the stage control panel as shown.
8. Check the other panels to be sure the last user left
this in the modes you want to use or you'll have
difficulties and could damage your sample.
(we are pretty strict about this).
(Fig. 1-B)
. Select the
(Fig. 2)
(Fig. 2-A)
(Fig. 3)
Figure 1. Front Panel Buttons
:
(Fig. 1-A)
. Let go
Figure 2. Specimen Size Setting
for the
. The
Figure 3. Control Panels
EVAC
AIR
B-
-A
-A
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Summary of Contents for Hitachi 3400-N

  • Page 1 Using the Hitachi 3400-N VP-SEM Before You Begin: Sign in on the Calendar (we are pretty strict about this). Wear gloves when handling anything that goes in the chamber such as stubs, specimens, sample holders. Finger oils contaminate the machine and destroy image quality.
  • Page 2 9. Go to the “Image” tab and choose SE (Secondary electron) or BSE (back scattered electron) mode as required/preferred. Standard imaging SE mode (Fig. 4-A) 10. Go to the “Condition” Tab and ensure the vacuum is set to SEM mode ond not VP-SEM (variable pressure i.e. low vacuum) (Fig.
  • Page 3 Figure 7. PC-SEM Control Buttons Electron Beam Setup: 1. Double click on the Beam Settings Frame to open the settings window. (Fig.7-A) 2. In the settings window , select the appropriate KV (Fig.8) for your specimen. (Fig.8-A) 3. Set the Probe Current to ~50 to begin.
  • Page 4 Figure 11. Focus, Brightness and Alignment Setup: 1. Click “Freeze/Run” to start the scan if it isn’t running. (Fig.11-A) 2. Click the ABCC button to set Auto Contrast and Brightness. This is only a (Fig.11-B) starting point. Further fine adjustment controls are on the manual dial panel. 3.
  • Page 5: Capturing An Image

    Figure 13. 6. Adjust contrast and brightness for proper dynamic range (good blacks, whites and greys). The ABCC button (Fig 13-A) is a starting point only-increase contrast and decrease brightness slightly from there using dials (Fig 12-C,D) 7. Click the desired scan speed: Fast to scan your Figure 14.
  • Page 6 Figure 16. Changing Specimens and/or Shutdown: 1. Click the HV OFF button in the upper left (Fig 16-A) or on the beam control window (Fig 17-A) 2. Click the AIR button in the upper right (Fig 16-B) 3. The Specimen Dimensions window will open (Fig 18) Figure 17.
  • Page 7: Appendix 1: Align The Instrument

    APPENDIX 1: Align the Instrument: If you change the mechanical aperture, the accelerating voltage or the probe current, specific alignments of the instrument must be performed. Mechanical Alignment: -At the desired magnification, first turn the X-Align knob at the (Fig.A1-X) side of the aperture control until the beam reaches its brightest.
  • Page 8: Beam Alignment

    APPENDIX 1 continued Aperture Alignment: -Move to a distinct edge or small feature. And activate “Aperture Align” Radio button. (Fig.A4-A) -The “Wobbler” mode is activated to exaggerate motion and assist you in aligning the aperture. Using the “Red1” scan mode will limit your vision and help you stay focused on one location.
  • Page 9: Appendix 2: Using Variable Pressure Mode

    APPENDIX 2: Using Variable Pressure Mode This mode allows you to view uncoated, non-conductive specimens by suppressing charging. 1. You will need a higher KV to use this mode, usually 10-25 KV with W.D. = 5-10 mm and probe current above 50.

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